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附着基底薄膜材料的原位电镜拉伸实验方法

吴 戈, 吕 坚，单智伟*
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2022年 第41卷 第6期: 1000-6281（2022）06-621-06     下载地址：

附着基底薄膜材料的原位电镜拉伸实验方法

吴  戈, 吕  坚，单智伟*

（1. 西安交通大学, 金属材料强度国家重点实验室, 微纳尺度材料行为研究中心, 陕西 西安710049；
2. 香港城市大学深圳福田研究院，广东 深圳 518045）

摘 要 薄膜材料通常附着于基底，其在耐磨抗蚀涂层、微纳机电系统、微纳电子元器件等方面有重要应用。这些材料在不同的服役条件下会处于不同的应力状态，如压缩和拉伸等。因此，对薄膜材料的压缩、拉伸性能的评估非常重要。由于通常情况下薄膜材料与基底的结合力较强，难以将其从基底上剥离从而转移至微纳力学平台上进行测试，因此先前的研究主要集中于附着基底薄膜材料的压缩性能。为了弥补先前报道对于此种材料拉伸实验方法介绍的不足，本文以纳米结构铝合金薄膜为例介绍了原位扫描电子显微与原位透射电子显微拉伸试样的加工流程、实验平台的设置方法及实验结果的简要演示。此方法实施简便，为测试附着基底薄膜材料拉伸性能的通用技术。该技术的发展有望为高强高延性薄膜材料的开发和应用提供有力的实验测试手段支持。

关键词  原位拉伸；电子显微；薄膜材料；微纳力学

中图分类号：TG115.5+2; TG13; O77; O3     文献识别码：A   doi:10.3969/j.issn.1000-6281.2022.06.007

 

In-situelectron microscope tension methods for thin films adhered to substrates

WU Ge1，LUJian2，SHAN Zhi-wei1*

（1.Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an Shannxi 710049；2. Department of Mechanical Engineering, City University of Hong Kong,Hong Kong, China)

Abstract    Thin film materials are usually adhered to substrates. They have important applications in anti-wear/corrosion coatings, micro/nano-electro-mechanical-systems and micro/nano electronic devices, etc. These materials show various stress states under  different conditions, such as compression and tension. Therefore, it is very important to evaluate the compressive and tensile properties of thin film materials. Generally, the adhesion between a film and a substrate is strong. It is difficult to detach the film from the substrate and subsequently transfer the film to a micro-/nanomechanical testing stage. Most previous studies only focus on compressive properties of thin film materials. Tension experiments are rarely reported. Here we present an experimental procedure to carry out in-situ scanning electron microscope and in-situ transmission electron microscope tension experiments. The procedure includes sample fabrication methods, experiment set-ups and experiment demos. It is a universal technique to test tensile property of thin film materials. The development of the technique is expected to provide a significant support of experimental testing method for potential applications on strong and ductile thin film materials.

Keywords   in-situtension; electron microscope; thin film materials; micro-/nano-mechanics

 

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