低噪声原子力显微镜测量单元设计
许军；金晨；牛刘敏；董诚；王慧云，王旭东；董震；孔融智；秦丽；温焕飞；马宗敏*低噪声原子力显微镜测量单元设计
许军；金晨；牛刘敏；董诚；王慧云，王旭东；董震；孔融智；秦丽；温焕飞；马宗敏*
（中北大学1.电子测试技术重点实验室；2.仪器与电子学院，山西太原030051）
摘 要 为进一步提高大气下非接触式原子力显微镜（NC-AFM）表征样品形貌的分辨率及纵向检测灵敏度，本文提出了一种基于光偏转检测方法的新型非接触式噪声溯源抑制模型及多级隔振的机械振动噪声主动隔振装置。通过多源噪声抑制系统的设计，实现了实验环境下传递到实验装置的高低频振动由69 nm有效的衰减至0.03 nm以下。结合光偏转理论，系统在大气下的探针检测灵敏度为156.4 mV·nm-1、电压偏转噪声密度为22.47 µV/
、偏转噪声密度达到了17.72 fm/。系统噪声得到有效的抑制，为进一步实验奠定了基础。
关键词：非接触式原子力显微镜（NC-AFM）；光偏转检测；噪声溯源抑制；主动隔振；低噪声
中图分类号： 文献标识码：A doi:10.3969/j.issn.1000-6281.2021.02.007
Design of measurement unit for low noise atomic force microscope
XU Jun1，2，JIN Chen1，2，NIU Liu-min1，2，DONG Cheng1，2，WANG Hui-yun1，2，WANG Xu-dong1，2，DONG Zhen1，2，KONG Rong-zhi1，2，QIN Li1,2;WEN Huan-fei1，2，MA Zong-min1，2*
（1．Science and Technology on Electronic Test and Measurement Laboratory，North University of China，Taiyuan Shanxi 030051；2.School of Instrument and Electronics，North University of China, Taiyuan Shanxi 030051，China）
Abstract In order to further improve the resolution and longitudinal detection sensitivity of non-contact atomic force microscopy (NC-AFM) in atmospheric environment, a new non-contact noise traceability suppression model based on optical deflection detection method and a multi-stage vibration isolation device for mechanical vibration and noise were proposed. Through the design of multi-source noise suppression system, the high-frequency and low-frequency vibration transmitted to the experimental device in the experimental environment is effectively attenuated from 69 nm to less than 0.03 nm. Combined with the optical deflection theory, the detection sensitivity of the probe is 156.4 mv/nm, the voltage deflection noise density is 22.47 μV/√Hzand the deflection noise density is 17.72 fm/√Hz in the atmosphere. The system noise is effectively suppressed, which lays a foundation for further experiments.
Keywords non-contact atomic force microscope (NC-AFM); optical deflection detection; noise traceability suppression; active vibration isolation; low noise
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