扫描电子显微镜原位可变温度电化学测试装置
唐 亮，石慧峰，马晋遥，张宜旭，吴 睿1，张跃飞*扫描电子显微镜原位可变温度电化学测试装置
唐 亮1，2，石慧峰1，马晋遥1，张宜旭1，2，吴 睿1，张跃飞1*
（1.北京工业大学固体微结构与性能研究所，北京 100124；
2.桂林电子科技大学机电工程学院，广西 桂林541004）
摘 要 本文介绍了一种基于扫描电子显微镜的原位电化学-扫描电子显微平台联合系统。该联合系统通过将扫描电镜与电化学测试设备联用，成功实现了对电极材料在嵌脱锂过程中形貌变化的原位、实时、动态的观察。首先介绍了原位联合系统的设计与搭建过程，然后对样品夹具和温度加载控制系统进行了详细描述。经过实验证明该原位联合系统可用于多种电池体系，如锂电、钠电和铝电等。
关键词 原位；扫描电镜；电化学测试设备
中图分类号: TG115.21+5.3；TN16 文献标识码：A doi:10.3969/j.issn.1000-6281.2020.03.002
The design of in-situ electrochemical-scanning electron microscope (ECSEM) system
TANG Liang，SHI Hui-feng，MA Jin-yao，ZHANG Yi-xu，WU Rui，ZHANG Yue-fei*
（Institute of Microstructure and Property of Advanced Materials，Beijing University of Technology，Beijing 100124，China）
Abstract This paper introduces anin-situ electrochemical-scanning electron microscope (ECSEM) system, which is based on SEM. By combining the electrochemical tester and SEM, the real-time observation of electrode materials during charging and discharging processes can be realized through this system. First, the design and built of in-situ system are introduced, and then two kinds of special custom fixture and temperature control systems are described in detail. Experiments show that the system can be used to study different battery systems, such as lithium ion battery, sodium ion battery and aluminum ion battery.
Keywords in-situ; SEM; electrochemical tester
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