基于激光悬臂梁的纳米薄膜生长厚度原位检测方法
张宜旭，唐 亮，唐 焱*，徐晋勇，屠金磊，张跃飞基于激光悬臂梁的纳米薄膜生长厚度原位检测方法
张宜旭1，2，唐 亮1，2，唐 焱1*，徐晋勇1，屠金磊2 ，张跃飞2
（1.桂林电子科技大学机电工程学院，广西桂林541004；
2.北京工业大学固体微结构与性能研究所，北京100124）
摘 要 针对现有材料表面镀膜装置缺乏表面质量监控和反馈系统，研制出一套基于激光微悬臂梁的纳米薄膜生长厚度检测系统。该平台由微悬臂梁、激光发射单元、压电陶瓷单元、光电探测器单元、伺服电机和人机界面组成。将检测结果反馈给镀膜系统，及时调整镀膜工艺参数，实现快速表征、精准镀膜。实验表明：该纳米薄膜生长厚度检测平台能够在镀膜过程中实时监控薄膜厚度，精度可达±3 nm。
关键词 扫描探针；微悬臂梁；压电陶瓷；原位检测
中图分类号：TB383；TG115.21+5.7
文献标识码：Adoi：10.3969j.issn.1000-6281.2020.02.002
In situ detection method of nano-film growth thickness based on laser cantilever
ZHANG Yi-xu1，2，TANG Liang1，2，TANG Yan1*，XU Jin-yong1，TU Jin-lei2，ZHANG Yue-fei2
(1.School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology, Guilin Guangxi 541004；2.Institute of Microstructure and Property of Advanced Materials，Beijing University of Technology，Beijing 100124，China)
Abstract A set ofin-situ inspection system of nano film growth thickness based on laser micro cantilever is developed for the lack of surface quality monitoring and feedback system in the existing material surface coating device. Consisting of micro cantilever, laser emission unit, piezoelectric ceramic unit, photodetector unit, servo motor and human-machine interface, the inspection system has the capacity of feeding back the test results to the coating system and adjust the coating process parameters timely so as to realize rapid characterization and accurate coating. The experimental results show that inspection system of nano film growth thickness can monitor the film thickness in real time during the coating process with an accuracy of ±3 nm.
Keywords scanning probe；micro cantilever；piezoelectric ceramics；in situdetection
全文下载请到同方知网，万方数据库或重庆维普等数据库中下载！