聚焦离子束致形变微纳加工研究进展

聚焦离子束致形变微纳加工研究进展

毛逸飞¹，吴文刚^1*，徐  军²

(北京大学1.微米/纳米加工技术国家重点实验室；2.电子显微镜实验室，北京 100871 )

摘 要  聚焦离子束技术（focused ion beam，FIB）由于其高精度刻蚀、定点加工、实时成像等优势，常用于精密加工、TEM制样等领域。其工作机理通常为：刻蚀、淀积与成像。而基于FIB新的加工手段正在被探索和研究，其中就包括两种聚焦离子束致形变技术，分别为聚焦离子束应力引入致形变技术（FIB-stress induced deformation，FIB-SID）和聚焦离子束物质再分布致形变技术（FIB-material-redistribution induced deformation，FIB-MRD）。前者通过控制FIB辐照时离子注入与溅射之间的竞争关系实现悬臂梁的多角度弯曲，后者利用粒子与物质作用时的瑞利不稳定性构建纳米结构，在一定意义上扩充了聚焦离子束的应用范围。运用上述方法可以加工三维微纳螺旋，悬浮光滑纳米弦以及大规模阵列化纳米网孔等多样化微/纳功能构件，在微流控系统，太赫兹通信，光学天线等领域具有很强的应用前景。

关键词  聚焦离子束应力引入致形变；聚焦离子束物质再分布致形变；微/纳功能结构加工

中图分类号：TH74；TN405；TG115.21⁺5.3  文献标识码：A    doi:10.3969/j.issn.1000-6281.2016.04.015

Focused-ion-beam stress introducing technology for micro/ nano-fabrications

MAO Yi-fei¹，WU Wen-gang^1*，XU Jun²

(1.National Key Laboratory of Micro/Nano Fabrication Technology，Institute of Microelectronics，Peking University，Beijing 100871；2. Electron Microscopy Laboratory，Peking University，Beijing 100871，China )

Abstract  Focused ion beam (FIB) technology is often applied in the fields of ultra-fine fabrication and TEM sample-preparation, because of its advantages of ultra-fine etching, pointing process and real-time imaging. The fundamental methods include three aspects: etching, deposition and imaging. Here two novel fabrication methods based on FIB are presented, which are called FIB stress introduced deformation (FIB-SID) and FIB material redistribution induced deformation (FIB-MRD). FIB-SID can precisely control the bending of structures by adjusting the relationship between ion implantation and sputtering during FIB scanning, and FIB-MRD will help build nano-structures utilizing Rayleigh instability during the interaction between ions and the target. By these methods, three dimensional micro/nano-helices, suspended and smooth ultra-thin nanowires as well as large scale nanopore arrays will be produced, which will have great potential in the fields such as micro-fluidic systems, Terahertz communication systems and optical antennas and so on .

Keywords  FIB-SID；FIB-MRD；micro/nano-structures deformation

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