ZnO量子点的电子束辐照生长
周 正1 ，田 鹤2*，李吉学3*
（浙江大学 1.电子显微镜中心，2.材料科学与工程学院，3.硅材料国家重点实验室，浙江 杭州310027）
摘要 在直径约40nm六方纤锌矿结构的ZnO纳米棒的 (10-10) 晶面上，通过电子束辐照生长粒度为5nm左右ZnO量子点。量子点表面为 (10-10) 、(0001)和（000-1） 三个晶面构成。通过控制电子束能流密度和氧分压实现控制ZnO量子点生长。
关键词 TEM；电子束辐照；ZnO量子点
中图分类号：O471.1；TG115.21+5.3 文献标识码：A doi:10.3969/j.issn.1000-6281.2016.04.003
Electron beam induced ZnO quantum dot growth
ZHOU Zheng，TIAN He*，LI Ji-xue*
（Center of Electron Microscope，State Key Laboratory of Silicon Material，School of Material Science & Engineering，Zhejiang University，HangzhouZhejiang 310027，China）
Abstract This paper demonstrates that the electron beam radiation contributes to theassisted growth of ZnO quantum dots (QDs) on the (10-10) side facets of wurtzite ZnO nanorods. The ZnO nanorods which acts as substrate has a diameter of ~ 40nm while the as-grown ZnO QDs have a dimension of ~5 nm. The QDs are terminated with (10-10)，(0001) and （000-1） three low energy nanofactes. The growth of ZnO QDs can be controlled by varying e-beam dose and oxygen partial pressure.
Keywords TEM；electron beam radiation；ZnO quantum dots
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