透射电镜原位力学拉伸-压缩加载装置的制备及应用
张丹利，刘博宇，王悦存，单智伟*
（西安交通大学 金属材料强度国家重点实验室 微纳尺度材料行为研究中心， 陕西 西安710049）
摘 要 具有实时观察、定量测试功能的透射电子显微镜下的原位力学测试技术可将在力作用下材料的微观结构演变与力学实验数据对应起来，帮助人们直观、深入地认识和理解材料的变形与损伤行为及其内在的本征机制，为材料性能的改进提供理论指导依据。本文介绍一种利用聚焦离子束刻蚀技术制备原位纳米力学实验拉伸-压缩加载装置的方法和应用案例。该方法简单易行，制备的装置可有效地保障拉伸实验接近单轴拉伸状态，同时该装置还可用于压缩、弯曲实验，并能实现拉伸、压缩、弯曲加载方式的灵活切换。
关键词 透射电子显微镜；原位纳米力学；聚焦离子束；拉伸-压缩加载装置
中图分类号：TH73；TH87；TG115.5+2；TG115.5+3文献标识码：A doi:10.3969/j.issn.1000-6281.2022.06.005
Fabrication and application of tension-compression loading device for in-situ nano mechanics based on transmission electron microscope
ZHANG Dan-li, LIU Bo-yu, WANG Yue-cun, SHAN Zhi-wei*
(Center for Advancing Materials Performance from the Nanoscale，State Key Laboratory for Mechanical Behavior of Materials; Xi’an Jiaotong University, Xi’an Shaanxi 710049, China)
Abstract In-situ quantitative nanomechanical testing devices based on transmission electron microscope can simultaneously record the microstructure evolution and the corresponding curves of strain-stress. This contributes to understanding the intrinsic mechanism of deformation and damage of a material, which can provide the valuable guidance for the improvement of material properties. Here we introduce a method to fabricate in-situ nanomechanical loading devices based on transmission electron microscope. This designed device can be used for tension, compression and bending tests, as well as tension-compression cycle tests. The tip in the device does not need to be replaced when we change the loading mode from tension to compression, which can avoid the potential damage of the loading device caused by manual replacement, especially in tension-compression cyclic testing.
KeywordsTransmission electron microscope; in-situ nanomechanical loading device; focused ion beam
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