基于原子力显微镜的压痕模式和双模纳米力学模式在模量表征中的影响因素

基于原子力显微镜的压痕模式和双模纳米力学模式在模量表征中的影响因素

单齐冀，韩   瑶，张  莹，李慧琴^*

（ 上海交通大学分析测试中心, 上海　200240）

摘  要 原子力显微镜是表征材料微观力学性质的重要手段，本文基于原子力显微镜的压痕法和双模纳米力学法，探究薄膜/基底材料与多层二维材料杨氏模量测定过程中的影响因素，分析了基底硬度、二维材料厚度以及环境湿度对两种纳米力学表征结果的影响，为研究适用于纳米材料微观力学的测定提供参考。

关键词 压痕模式；双模纳米力学模式；基底；厚度；湿度

中图分类号：TH742   文献标识码：A     doi:10.3969/j.issn.1000-6281.2022.02.008

Influence factors of indentation mode and bimodal nanomechanical mode based on atomic force microscope in modulus characterization

SHAN Qi-Ji¹，HAN Yao¹，ZHANG Ying¹，LI Hui-qin¹*

（1. Instrumental Analysis Center, Shanghai Jiao Tong University, Shanghai 200240，China）

Abstract  Atomic force microscope is an important means to characterize the micromechanical properties of materials. Based on the indentation method of the atomic force microscope and the bimodal nanomechanical method, this research explored the influencing factors in the determination of the modulus of film/substrate materials and multilayer two-dimensional materials. In this paper, we studied the influence of substrate hardness, two-dimensional material thickness and environmental humidity when characterizing nanomechanics. And the results provided a reference for the nanomechanical test of composite materials.

Keywords indentation mode; bimodal nanomechanical mode; substrate; thickness; humidity

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